30 μm silicon-based interdigital electrode with high precision and stability MEMS gas biosensor capacitance array
| 【Numbering】BK2021012603 | 【CAS】cas | ||
| 【Item No.】BK2021012603 | 【specification】 | ||
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1. Dimensions: 4mm*6mm*0.52mm.
2. Line width: 30um, line distance: 30um, finger length: 1.5mm, number of interdigital fingers: 20 (40 fingers). 3. The electrode substrate is monocrystalline silicon, and SiO2 is grown on the surface of the silicon wafer, with a thickness of 300nm; 4. Metal layer structure: Cr/Au, with a thickness of 10nm and 100nm respectively;
5. Electrode operating temperature range: -150℃～500℃;
6. Mainly used in various chemical, physical and medical sensors, with reliable performance and stable quality. 7. Large quantity and preferential price.
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2. Line width: 30um, line distance: 30um, finger length: 1.5mm, number of interdigital fingers: 20 (40 fingers). 3. The electrode substrate is monocrystalline silicon, and SiO2 is grown on the surface of the silicon wafer, with a thickness of 300nm; 4. Metal layer structure: Cr/Au, with a thickness of 10nm and 100nm respectively;
5. Electrode operating temperature range: -150℃～500℃;
6. Mainly used in various chemical, physical and medical sensors, with reliable performance and stable quality. 7. Large quantity and preferential price.
We provide a variety of interdigital electrodes, including different shapes, different sizes, different line widths and distances, different substrates (alumina ceramics, PI/PET flexible materials, monocrystalline silicon), and different processes (thick film process, PCB process, MEMS process)
| Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance |
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| Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance.The website pictures are from the Internet. The pictures are for reference only. Please take the real object as the standard. In case of infringement, please contact us to delete them immediately. |
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